We developed and tested a new method for in situ characterization and distribution of inorganic particles in biopsied lung tissue from three diverse human subject groups using field emission scanning electron microscopy with an energy dispersive analyzer. A backscattered electron image of each frame was acquired to locate inorganic particulate matter. The electron beam was deflected to points on the particles in the field of view to acquire an energy dispersive spectrum. The acquired spectra were used to identify the particle type.